製品情報
真空対応電動ステージ
製品詳細
概要
Standa 社では、電動ステージからシンプルな手動光学マウントまで、真空システム、真空対応デバイスの設計と製造に豊富な経験があります。
Standa社製真空対応機器はすべて 10 -6 Torr の真空用に設計されています。
真空対応ステッピング モーターを搭載した製品に対応する電源も併せて提供しています。
特長
・10 -6 Torr の真空用に設計
・複数モデルから選択可能
・1軸、2軸モデル
仕様
■ 8MT160V-300XY
Specifications | ||
---|---|---|
Travel range | X-axis | 300 mm |
Y-axis | 300 mm | |
Resolution | Full Step | 2.5 µm |
1/8 step | 0.31 µm | |
Lead screw pitch | 0.5 mm | |
Max. speed | 8 mm/s | |
Load capacity | Horizontal | 10 kg |
Vertical | request | |
Motors | V423 | |
Supply voltage | 36 V | |
Motor connector | HDB15(M) | |
Recommended controller | 8SMC5-USB |
■ 8MT167V-100
Specifications | ||
---|---|---|
Travel tange | 100 mm | |
Resolution | in full step | 1 μm |
in 1/8 step | 0.125 μm | |
Lead screw pitch | 0.5 mm | |
Reduction ratio | 2.5/1 | |
Max speed | 2 mm/s | |
Load capacity | Horizontal | 6 kg |
Vertical | 1.5 kg | |
Motor | VSS42 | |
Vacuum compatible cable | Integrated, 2 m | |
Connector | HDB15 (M) | |
Limit Switches | 2, mechanical | |
switch polarity | Pushed is closed | |
Weight | 1.6 kg |
■ 8MT167V-25
Specifications | ||
---|---|---|
Travel tange | 25 mm | |
Resolution | in full step | 1.25 μm |
in 1/8 step | 0.156 μm | |
Lead screw pitch | 0.25 mm | |
Max speed | 2.5 mm/s | |
Load capacity | Horizontal | 5 kg |
Vertical | 3.5 kg | |
Motor | VSS42 | |
Vacuum compatible cable | Integrated, 2 m | |
Connector | HDB15 (M) | |
Limit Switches | 2, mechanical | |
switch polarity | Pushed is closed | |
Weight | 0.85 kg |
■ 8MT175V
Specifications | ||
---|---|---|
Lead screw pitch | 0.5 mm | |
Resolution in full | 2.5 μm | |
Max speed | 5 mm/s | |
Load capacity | Horizontal | 8 kg |
Vertical | 3 kg | |
Vacuum, Torr | 10-6 | |
Motor Connector | DB9 (M) | |
Stepper Motor | VSS42 | |
Assemblies | X-Y | Directly |
Z | 2AB175V | |
To flat surface | 3BP175V | |
Recommended controller | 8SMC5-USB | |
Type | Pushed is “closed” |
■ 8MT173V
Model | 8MT173V-10 | 8MT173V-20 | 8MT173V-25 | 8MT173V-30 | |
---|---|---|---|---|---|
Travel range, mm | 10 | 20 | 25 | 30 | |
Lead screw pitch, mm | 0.25 | ||||
Resolution in full step*, µm | 1.25 | ||||
Max. speed*, mm/s | 2.5 | ||||
Load capacity: (motor position from below only) | Horizontal, kg | 3 | |||
Vertical, kg | 1 | ||||
Fleuroplastic cable | integrated, 2 m length | ||||
Motor connector | HDB15(M) | ||||
Motor | VSS42 | ||||
Weight, kg | 0.42 | 0.48 | 0.49 | 0.5 | |
Assemblies: | X-Y | 2CP173V-20 | |||
Z | 2AB173V-20 | ||||
Recommended controllers | 8SMC5-USB |
■ 8MT173V-DCE
Model | 8MT173V-10DCE | 8MT173V-20DCE | 8MT173V-25DCE | 8MT173V-30DCE | |
---|---|---|---|---|---|
Travel range, mm | 10 | 20 | 25 | 30 | |
Lead screw pitch, mm | 0.25 | ||||
Resolution, µm | 0.028 | ||||
Minimal incremental motion, µm | 0.1 | ||||
Bi-directional Repeatability, µm | 0.4 | ||||
Max. speed*, mm/s | 0.16 | ||||
Load capacity: (motor position from below only) | Horizontal, kg | 5 | |||
Vertical, kg | 1 | ||||
Fleuroplastic cable | integrated, 2 m length | ||||
Motor connector | HDB15(M) | ||||
Motor | DCE1841 | ||||
Weight, kg | 0.43 | 0.46 | 0.47 | 0.48 | |
Assemblies: | X-Y | 2CP173V-20 | |||
Z | 2AB173V-20 | ||||
Recommended controller | 8SMC5-USB |
■ 8MT30V-50
Specifications | ||
---|---|---|
Travel tange | 50 mm | |
Lead screw pitch | 0.25 mm | |
Resolution in full step | 1.25 μm | |
Max speed | 2.5 mm/s | |
Load capacity | Horizontal | 3 kg |
Vertical | 1 kg | |
Fleuroplastic cable | 2 m length (integrated) | |
Motor Connector | HDB15 (M) | |
Motor | VSS42 | |
Weight | 0.55 kg | |
Assemblies | X-Y | 2CP173V-50-20 |
Z | 2AB173V-20-50 | |
Recommended controllers | 8SMC5-USB |
■ 8MTFV
Specifications | ||
---|---|---|
Travel tange | 40 x 40 mm | |
Lead screw pitch | 0.5 mm | |
Resolution | full step | 2.5 μm |
1/8 step | 0.31 μm | |
Max speed | 5 mm/s | |
Load capacity | Horizontal | 15 kg |
Vertical | 3.5 kg | |
Vacuum compatible cable | Integrated, 2 m length | |
Motor Connector | HDB15 (M) | |
Motor | V423 | |
Weight | 3.5 kg | |
Mechanical end limit switches | 4 (2 per axis) | |
switch polarity | Pushed is closed | |
Recommended controllers | 8SMC5-USB |
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03-6659-7541
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